Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell(#)

A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the ident...

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Bibliographic Details
Main Authors: Poghossian, Arshak, Schumacher, Kerstin, Kloock, Joachim P., Rosenkranz, Christian, Schultze, Joachim W., Müller-Veggian, Mattea, Schöning, Michael J.
Format: Artigo
Language:Inglês
Published: Molecular Diversity Preservation International (MDPI) 2006
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3872360/
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