New understanding of hardening mechanism of TiN/SiN(x)-based nanocomposite films

In order to clarify the controversies of hardening mechanism for TiN/SiN(x)-based nanocomposite films, the microstructure and hardness for TiN/SiN(x )and TiAlN/SiN(x )nanocomposite films with different Si content were studied. With the increase of Si content, the crystallization degree for two serie...

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Bibliografiske detaljer
Main Authors: Li, Wei, Liu, Ping, Zhao, Yongsheng, Ma, Fengcang, Liu, Xinkuan, Chen, Xiaohong, He, Daihua
Format: Artigo
Sprog:Inglês
Udgivet: Springer 2013
Fag:
Nano Express
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3856532/
https://ncbi.nlm.nih.gov/pubmed/24134611
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-427
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