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Three Cavity Tunable MEMS Fabry Perot Interferometer

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the...

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Detalhes bibliográficos
Main Authors: Parashar, Avinash, Shah, Ankur, Packirisamy, Muthukumaran, Sivakumar, Narayanswamy
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2007
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3841881/
https://ncbi.nlm.nih.gov/pubmed/28903280
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