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Scalable synthesis of a biocompatible, transparent and superparamagnetic photoresist for microdevice fabrication
The functionalization of photoresists with colloids has enabled the development of novel active and passive components for microfabricated devices. Incorporation of colloidal particles often results in undesirable reductions in photolithographic fidelity and device transparency. We present a novel p...
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| Hauptverfasser: | , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3835212/ https://ncbi.nlm.nih.gov/pubmed/24273390 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/23/10/107002 |
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