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A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tan, Qiulin, Kang, Hao, Xiong, Jijun, Qin, Li, Zhang, Wendong, Li, Chen, Ding, Liqiong, Zhang, Xiansheng, Yang, Mingliang
Format: Artigo
Sprache:Inglês
Veröffentlicht: Molecular Diversity Preservation International (MDPI) 2013
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3812585/
https://ncbi.nlm.nih.gov/pubmed/23917261
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130809896
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