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A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be comp...
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| Hauptverfasser: | , , , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3812585/ https://ncbi.nlm.nih.gov/pubmed/23917261 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130809896 |
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