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Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electrothermal fields coupling and a one-way sequ...

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Detalhes bibliográficos
Main Authors: Sadek, Khaled, Moussa, Walied
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2007
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3756723/
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