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A MEMS Electrochemical Bellows Actuator for Fluid Metering Applications
We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actu...
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| Glavni autori: | , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2013
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3755886/ https://ncbi.nlm.nih.gov/pubmed/22833156 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10544-012-9685-0 |
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