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Structural and nanomechanical properties of BiFeO(3) thin films deposited by radio frequency magnetron sputtering
The nanomechanical properties of BiFeO(3) (BFO) thin films are subjected to nanoindentation evaluation. BFO thin films are grown on the Pt/Ti/SiO(2)/Si substrates by using radio frequency magnetron sputtering with various deposition temperatures. The structure was analyzed by X-ray diffraction, and...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Springer
2013
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3695780/ https://ncbi.nlm.nih.gov/pubmed/23799923 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-297 |
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