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A Complete Physical Germanium-on-Silicon Quantum Dot Self-Assembly Process

Achieving quantum dot self-assembly at precise pre-defined locations is of vital interest. In this work, a novel physical method for producing germanium quantum dots on silicon using nanoindentation to pre-define nucleation sites is described. Self-assembly of ordered ~10 nm height germanium quantum...

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Bibliografiska uppgifter
Huvudupphovsmän: Alkhatib, Amro, Nayfeh, Ammar
Materialtyp: Artigo
Språk:Inglês
Publicerad: Nature Publishing Group 2013
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC3695558/
https://ncbi.nlm.nih.gov/pubmed/23807261
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep02099
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