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Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers
In this work, nanoimprint lithography combined with standard anodization etching is used to make perfectly organised triangular arrays of vertical cylindrical alumina nanopores onto standard <100>−oriented silicon wafers. Both the pore diameter and the period of alumina porous array are well c...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3686656/ https://ncbi.nlm.nih.gov/pubmed/23773702 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-287 |
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