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Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for micro parts in MEMS applications. In the MR polishing process, the magnetic force plays a dominant role. This method uses MR fluids which contains micro abrasives as a polishin...

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Main Authors: Kim, Dong-Woo, Cho, Myeong-Woo, Seo, Tae-Il, Shin, Young-Jae
Formáid: Artigo
Teanga:Inglês
Foilsithe: Molecular Diversity Preservation International (MDPI) 2008
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Rochtain Ar Líne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3681144/
https://ncbi.nlm.nih.gov/pubmed/27879705
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