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A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes
For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors' thermal performance should be considered during sensor design. The radiati...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3649438/ https://ncbi.nlm.nih.gov/pubmed/23385413 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130201998 |
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