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Design of a Novel MEMS Gyroscope Array
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and...
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| Main Authors: | , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Molecular Diversity Preservation International (MDPI)
2013
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3649420/ https://ncbi.nlm.nih.gov/pubmed/23358367 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130201651 |
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