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Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity
We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor(MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitiv...
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| Autors principals: | , , , , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Molecular Diversity Preservation International (MDPI)
2012
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3522990/ https://ncbi.nlm.nih.gov/pubmed/23202237 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s121115873 |
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