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Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity

We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor(MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitiv...

Täydet tiedot

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Bibliografiset tiedot
Päätekijät: Yoshikawa, Genki, Akiyama, Terunobu, Loizeau, Frederic, Shiba, Kota, Gautsch, Sebastian, Nakayama, Tomonobu, Vettiger, Peter, de Rooij, Nico F., Aono, Masakazu
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Molecular Diversity Preservation International (MDPI) 2012
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC3522990/
https://ncbi.nlm.nih.gov/pubmed/23202237
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s121115873
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