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Laser etching of groove structures with micro-optical fiber-enhanced irradiation
A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field int...
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| Main Authors: | , , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
Springer
2012
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3503691/ https://ncbi.nlm.nih.gov/pubmed/22713521 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-318 |
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