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High Throughput Micropatterning of Optical Oxygen Sensor for Single Cell Analysis

In this paper, we present our results from process development and characterization of optical oxygen sensors that are patterned by traditional UV lithography. An oxygen sensitive luminescent probe, platinum octaethylporphyrin (PtOEP), was encapsulated in commercially purchased photoresist (AZ5214)...

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Detalhes bibliográficos
Main Authors: Zhu, Haixin, Tian, Yanqing, Bhushan, Shivani, Su, Fengyu, Meldrum, Deirdre R.
Formato: Artigo
Idioma:Inglês
Publicado em: 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3468159/
https://ncbi.nlm.nih.gov/pubmed/23066352
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JSEN.2011.2176930
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