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Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micro...
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| 主要な著者: | , , , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer US
2012
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3444706/ https://ncbi.nlm.nih.gov/pubmed/22639233 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10544-012-9661-8 |
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