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Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility
OBJECTIVES: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. METHODS: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Occupational Safety and Health Research Institute
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3431888/ https://ncbi.nlm.nih.gov/pubmed/22953186 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.5491/SHAW.2011.2.1.39 |
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