Exposure to Volatile Organic Compounds and Possibility of Exposure to By-product Volatile Organic Compounds in Photolithography Processes in Semiconductor Manufacturing Factories

OBJECTIVES: The purpose of this study was to measure the concentration of volatile organic compound (VOC)s originated from the chemicals used and/or derived from the original parental chemicals in the photolithography processes of semiconductor manufacturing factories. METHODS: A total of four photo...

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Main Authors: Park, Seung-Hyun, Shin, Jung-Ah, Park, Hyun-Hee, Yi, Gwang Yong, Chung, Kwang-Jae, Park, Hae-Dong, Kim, Kab-Bae, Lee, In-Seop
Formato: Artigo
Idioma:Inglês
Publicado em: Occupational Safety and Health Research Institute 2011
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Original Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3430900/
https://ncbi.nlm.nih.gov/pubmed/22953204
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.5491/SHAW.2011.2.3.210
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