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Direct-Write Maskless Lithography of LBL Nanocomposite Films and its Prospects for MEMS Technologies

Application of nanocomposites in MEMS, flexible electronics, and biomedical devices is likely to demonstrate new performance standards and resolve a number of difficult technical problems enabled by the unique combinations of electrical, optical, and mechanical properties. This study explores the po...

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Enregistré dans:
Détails bibliographiques
Auteurs principaux: Bai, Yongxiao, Ho, Szushen, Kotov, Nicholas A.
Format: Artigo
Langue:Inglês
Publié: 2012
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3427742/
https://ncbi.nlm.nih.gov/pubmed/22740054
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c2nr30197k
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