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Thermal-Mechanical Noise Based CMUT Characterization and Sensing

When capacitive micromachined ultrasonic transducers (CMUTs) are monolithically integrated with custom-designed low-noise electronics, the output noise of the system can be dominated by the CMUT thermal-mechanical noise both in air and in immersion even for devices with low capacitance. Since the th...

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Autors principals: Gurun, Gokce, Hochman, Michael, Hasler, Paul, Degertekin, F. Levent
Format: Artigo
Idioma:Inglês
Publicat: 2012
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3381655/
https://ncbi.nlm.nih.gov/pubmed/22718877
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2012.2317
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