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A practical guide for the fabrication of microfluidic devices using glass and silicon
This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key proc...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3365353/ https://ncbi.nlm.nih.gov/pubmed/22662101 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3689939 |
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