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Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices
Surface acoustic wave (SAW) devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO) film deposited on top of an ultra-smooth nanocrystalline diamond (UNCD) layer. The smooth surface of the UNCD film allowed the growth of the ZnO film with excellent c-axis orientation and low surface roug...
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| Main Authors: | , , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3360720/ https://ncbi.nlm.nih.gov/pubmed/22655016 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3699974 |
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