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Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors
The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a 99.9% ruthenium target on p-type silicon substrates using radio frequency (r.f.) sputtering with N(2) gas. Subsequently, the nanometric structur...
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| Hlavní autoři: | , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Molecular Diversity Preservation International (MDPI)
2009
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3348812/ https://ncbi.nlm.nih.gov/pubmed/22574026 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90402478 |
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