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Preparation and characterization of ZnO microcantilever for nanoactuation

Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron micro...

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Enregistré dans:
Détails bibliographiques
Auteurs principaux: Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
Format: Artigo
Langue:Inglês
Publié: Springer 2012
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3312835/
https://ncbi.nlm.nih.gov/pubmed/22401138
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-176
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