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Preparation and characterization of ZnO microcantilever for nanoactuation
Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron micro...
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| Main Authors: | , , , , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Springer
2012
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3312835/ https://ncbi.nlm.nih.gov/pubmed/22401138 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-176 |
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