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Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking
This paper presents a novel technique for the integration of small CMOS chips into a large area substrate. A key component of the technique is the CMOS chip based self-aligned masking. This allows for the fabrication of sockets in wafers that are at most 5 µm larger than the chip on each side. The c...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3293476/ https://ncbi.nlm.nih.gov/pubmed/22400126 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TCPMT.2011.2166395 |
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