A carregar...

Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking

This paper presents a novel technique for the integration of small CMOS chips into a large area substrate. A key component of the technique is the CMOS chip based self-aligned masking. This allows for the fabrication of sockets in wafers that are at most 5 µm larger than the chip on each side. The c...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Main Authors: Uddin, Ashfaque, Milaninia, Kaveh, Chen, Chin-Hsuan, Theogarajan, Luke
Formato: Artigo
Idioma:Inglês
Publicado em: 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3293476/
https://ncbi.nlm.nih.gov/pubmed/22400126
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TCPMT.2011.2166395
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!