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Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods
This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary...
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| Hlavní autoři: | , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Molecular Diversity Preservation International (MDPI)
2010
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3292158/ https://ncbi.nlm.nih.gov/pubmed/22399918 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100504983 |
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