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CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...
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| Главные авторы: | , , , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Molecular Diversity Preservation International (MDPI)
2010
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3292114/ https://ncbi.nlm.nih.gov/pubmed/22399875 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100504180 |
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