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Microelectrode arrays fabricated using a novel hybrid microfabrication method
We present novel hybrid microfabrication methods for microelectrode arrays that combine microwire assembly, microelectromechanical systems (MEMS) manufacturing techniques and precision tool-based micromachining. This combination enables hybrid microfabrication to produce complex geometries and struc...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3289734/ https://ncbi.nlm.nih.gov/pubmed/21979567 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10544-011-9597-4 |
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