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Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure

Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hsu, Cheng-Liang, Shen, Chi-Yen, Tsai, Rume-Tze, Su, Ming-Yau
Format: Artigo
Sprache:Inglês
Veröffentlicht: Molecular Diversity Preservation International (MDPI) 2009
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3280843/
https://ncbi.nlm.nih.gov/pubmed/22399951
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90200980
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