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Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure

Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-...

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Detalhes bibliográficos
Main Authors: Hsu, Cheng-Liang, Shen, Chi-Yen, Tsai, Rume-Tze, Su, Ming-Yau
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2009
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3280843/
https://ncbi.nlm.nih.gov/pubmed/22399951
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90200980
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