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Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a...
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2011
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3279215/ https://ncbi.nlm.nih.gov/pubmed/22368471 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120100320 |
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