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Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit
A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a...
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| Hauptverfasser: | , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2010
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3274250/ https://ncbi.nlm.nih.gov/pubmed/22319329 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100403835 |
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