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A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel
A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silico...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3274117/ https://ncbi.nlm.nih.gov/pubmed/22344393 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s110101078 |
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