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Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly ind...

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Bibliografski detalji
Glavni autori: Hou, Zhanqiang, Xiao, Dingbang, Wu, Xuezhong, Dong, Peitao, Chen, Zhihua, Niu, Zhengyi, Zhang, Xu
Format: Artigo
Jezik:Inglês
Izdano: Molecular Diversity Preservation International (MDPI) 2010
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3274069/
https://ncbi.nlm.nih.gov/pubmed/22346578
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s110100296
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