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Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes
It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly ind...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3274069/ https://ncbi.nlm.nih.gov/pubmed/22346578 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s110100296 |
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