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Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and re...

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Detalhes bibliográficos
Main Authors: Ostasevicius, Vytautas, Gaidys, Rimvydas, Dauksevicius, Rolanas
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2009
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3267218/
https://ncbi.nlm.nih.gov/pubmed/22303170
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s91210201
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