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Rolled-up tubes and cantilevers by releasing SrRuO(3)-Pr(0.7)Ca(0.3)MnO(3 )nanomembranes
Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO(3)/Pr(0.7)Ca(0.3)MnO(3)/SrRuO(3 )nanometer-sized trilayers from SrTiO(3)(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching...
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| 主要な著者: | , , , , , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer
2011
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3257320/ https://ncbi.nlm.nih.gov/pubmed/22151894 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-621 |
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