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FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer
The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in wh...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3231721/ https://ncbi.nlm.nih.gov/pubmed/22164040 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s110807710 |
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