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Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of...

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Библиографические подробности
Главные авторы: Zhu, Rong, Ding, Henggao, Su, Yan, Yang, Yongjun
Формат: Artigo
Язык:Inglês
Опубликовано: Molecular Diversity Preservation International (MDPI) 2010
Предметы:
Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC3231226/
https://ncbi.nlm.nih.gov/pubmed/22163655
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100908304
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