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Design and Characterization of a High Resolution Microfluidic Heat Flux Sensor with Thermal Modulation

A complementary metal-oxide semiconductor-compatible process was used in the design and fabrication of a suspended membrane microfluidic heat flux sensor with a thermopile for the purpose of measuring the heat flow rate. The combination of a thirty-junction gold and nickel thermoelectric sensor with...

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Detalhes bibliográficos
Main Authors: Nam, Sung-Ki, Kim, Jung-Kyun, Cho, Sung-Cheon, Lee, Sun-Kyu
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2010
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3231132/
https://ncbi.nlm.nih.gov/pubmed/22163568
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100706594
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