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Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride
The paper presents a novel pressure sensor based on a silicon nitride (SiN(x)) nanocoated long-period grating (LPG). The high-temperature, radio-frequency plasma-enhanced chemical-vapor-deposited (RF PECVD) SiN(x) nanocoating was applied to tune the sensitivity of the LPG to the external refractive...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3231098/ https://ncbi.nlm.nih.gov/pubmed/22163527 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s101211301 |
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