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Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride

The paper presents a novel pressure sensor based on a silicon nitride (SiN(x)) nanocoated long-period grating (LPG). The high-temperature, radio-frequency plasma-enhanced chemical-vapor-deposited (RF PECVD) SiN(x) nanocoating was applied to tune the sensitivity of the LPG to the external refractive...

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Detalhes bibliográficos
Main Authors: Smietana, Mateusz, Bock, Wojtek J., Mikulic, Predrag, Chen, Jiahua
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2010
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3231098/
https://ncbi.nlm.nih.gov/pubmed/22163527
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s101211301
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