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Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the reflection characteristic of the fabricat...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3211295/ https://ncbi.nlm.nih.gov/pubmed/21711744 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-236 |
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