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Common-path low-coherence interferometry fiber-optic sensor guided microincision
We propose and demonstrate a common-path low-coherence interferometry (CP-LCI) fiber-optic sensor guided precise microincision. The method tracks the target surface and compensates the tool-to-surface relative motion with better than ±5 μm resolution using a precision micromotor connected to the too...
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Main Authors: | , |
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Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
Society of Photo-Optical Instrumentation Engineers (SPIE)
2011
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3188640/ https://ncbi.nlm.nih.gov/pubmed/21950912 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3622492 |
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