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Common-path low-coherence interferometry fiber-optic sensor guided microincision

We propose and demonstrate a common-path low-coherence interferometry (CP-LCI) fiber-optic sensor guided precise microincision. The method tracks the target surface and compensates the tool-to-surface relative motion with better than ±5 μm resolution using a precision micromotor connected to the too...

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Detalhes bibliográficos
Main Authors: Zhang, Kang, Kang, Jin U.
Formato: Artigo
Idioma:Inglês
Publicado em: Society of Photo-Optical Instrumentation Engineers (SPIE) 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3188640/
https://ncbi.nlm.nih.gov/pubmed/21950912
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3622492
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