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Fabrication of Planar, Layered Nanoparticles Using Tri-layer Resist Templates
A simple and universal pathway to produce free multilayer synthetic nanoparticles is developed based on lithography, vapor phase deposition and a tri-layer resist lift off and release process. The fabrication method presented in this work is ideal for production of a broad range of nanoparticles, ei...
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| Hauptverfasser: | , , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2011
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3143003/ https://ncbi.nlm.nih.gov/pubmed/21415483 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0957-4484/22/18/185302 |
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