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Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces
There is strong experimental evidence for the existence of strange modes of failure of microelectromechanical systems (MEMS) devices under mechanical shock and impact. Such failures have not been explained with conventional models of MEMS. These failures are characterized by overlaps between moving...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2006
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3123889/ https://ncbi.nlm.nih.gov/pubmed/21720492 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/16/11/03 |
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