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High-sensitivity and wide-directivity ultrasound detection using high Q polymer microring resonators
Small size ultrahigh Q polymer microrings working at near visible wavelength have been experimentally demonstrated as ultralow noise ultrasound detectors with wide directivity at high frequencies (>20 MHz). By combining a resist reflow and a low bias continuous etching and passivation process in...
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Main Authors: | , , |
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Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
American Institute of Physics
2011
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3112187/ https://ncbi.nlm.nih.gov/pubmed/21673832 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3589971 |
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