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Oblique-incidence sputtering of Ru intermediate layer for decoupling of intergranular exchange in perpendicular recording media
During the Ru deposition process for granular type perpendicular magnetic recording media, both a reduction in the Ru intermediate layer thickness and lowering of sputtering gas pressure were successfully achieved by focusing on a self-shadowing effect. Oblique-incidence sputtering with a 60° incide...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
American Institute of Physics
2011
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3085536/ https://ncbi.nlm.nih.gov/pubmed/21544214 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3562262 |
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