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AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS
We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a qu...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3018737/ https://ncbi.nlm.nih.gov/pubmed/21234274 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/SENSOR.2009.5285771 |
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