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Pore Size Control of Ultra-thin Silicon Membranes by Rapid Thermal Carbonization
Rapid thermal carbonization in a dilute acetylene (C(2)H(2)) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain...
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| Auteurs principaux: | , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2010
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2967790/ https://ncbi.nlm.nih.gov/pubmed/20839831 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl101602z |
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