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Pore Size Control of Ultra-thin Silicon Membranes by Rapid Thermal Carbonization

Rapid thermal carbonization in a dilute acetylene (C(2)H(2)) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain...

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Detalhes bibliográficos
Main Authors: Fang, David Z., Striemer, Christopher C., Gaborski, Thomas R., McGrath, James L., Fauchet, Philippe M.
Formato: Artigo
Idioma:Inglês
Publicado em: 2010
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC2967790/
https://ncbi.nlm.nih.gov/pubmed/20839831
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl101602z
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