Caricamento...
A versatile diffractive maskless lithography for single-shot and serial microfabrication
We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and...
Salvato in:
| Autori principali: | , , , , |
|---|---|
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Optical Society of America
2010
|
| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2920747/ https://ncbi.nlm.nih.gov/pubmed/20589036 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.18.011754 |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|